Optical Imaging in Projection Microlithography - A. Wong (SPIE, 2005) WW.pdf

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Optical Imaging in

Projection Microlithography

Downloaded from SPIE Digital Library on 25 Feb 2010 to 130.60.68.45. Terms of Use: http://spiedl.org/terms

Tutorial Texts Series

• Optical Imaging in Projection Microlithograpy,

Alfred Kwok-Kit Wong, TT66

• Metrics for High-Quality Specular Surfaces,

Lionel R. Baker, TT65

• Field Mathematics for Electromagnetics, Photonics, and Materials Science,

Bernard Maxum, TT64

• High-Fidelity Medical Imaging Displays,

Aldo Badano, Michael J. Flynn, and Jerzy Kanicki, TT63

• Diffractive Optics—Design, Fabrication, and Test,

Donald C. O'Shea, Thomas J. Suleski, Alan D.

Kathman, and Dennis W. Prather, TT62

• Fourier-Transform Spectroscopy Instrumentation Engineering,

Vidi Saptari, TT61

• The Power- and Energy-Handling Capability of Optical Materials, Components, and Systems,

Roger M.

Wood, TT60

• Hands-on Morphological Image Processing,

Edward R. Dougherty, Roberto A. Lotufo, TT59

• Integrated Optomechanical Analysis,

Keith B. Doyle, Victor L.

Genberg,

Gregory J. Michels, Vol. TT58

• Thin-Film Design: Modulated Thickness and Other Stopband Design Methods,

Bruce Perilloux, Vol. TT57

•

Optische Grundlagen für

Infrarotsysteme,

Max J. Riedl, Vol. TT56

• An Engineering Introduction to Biotechnology,

Patrick Fitch, Vol. TT55

• Image Performance in CRT Displays,

Kenneth Compton, Vol. TT54

• Introduction to Laser Diode-Pumped Solid State Lasers,

Richard Scheps, Vol. TT53

• Modulation Transfer Function in Optical and Electra-Optical Systems,

Glenn D. Boreman, Vol. TT52

• Uncooled Thermal Imaging Arrays, Systems, and Applications,

Paul W. Kruse, Vol. TT51

• Fundamentals of Antennas,

Christos G. Christodoulou and Parveen Wahid, Vol. TT50

• Basics of Spectroscopy,

David W. Ball, Vol. TT49

• Optical Design Fundamentals Jor infrared Systems, Second Edition,

Max J. Riedl, Vol. TT48

• Resolution Enhancement Techniques in Optical Lithography,

Alfred Kwok-Kit Wong, Vol. TT47

• Copper Interconnect Technology,

Christoph

Steinbriichel and Barry L. Chin, Vol. TT46

• Optical Design for Visual Systems,

Bruce H. Walker, Vol. TT45

• Fundamentals of Contamination Control,

Alan C. Tribble, Vol. TT44

• Evolutionary Computation: Principles and Practice for Signal Processing,

David Fogel, Vol. TT43

• Infrared Optics and Zoom Lenses,

Allen Mann, Vol. TT42

• Introduction to Adaptive Optics,

Robert K. Tyson, Vol. TT41

• Fractal and Wavelet Image Compression Techniques,

Stephen Welstead, Vol. TT40

• Analysis of Sampled Imaging Systems,

H. Vollmerhausen and R. G. Driggers, Vol. TT39

• Tissue Optics: Light Scattering Methods and Instruments for Medical Diagnosis,

Valery Tuchin, Vol. TT38

• Fundamentos de Electro Optica para Ingenieros,

Glenn D. Boreman, translated by Javier Alda, Vol. TT37

• Infrared Design Examples,

William L. Wolfe, Vol. TT36

• Sensor and Data Fusion Concepts and Applications, Second Edition,

L. A. Klein, Vol. TT35

• Practical Applications of Infrared Thermal Sensing and Imaging Equipment, Second Edition,

Herbert

Kaplan, Vol. TT34

• Fundamentals ofMachine Vision,

Harley R. Myler, Vol. TT33

• Design and Mounting of Prisms and Small Mirrors in Optical Instruments,

Paul R. Yoder, Jr., Vol. TT32

• Basic Electro-Optics for Electrical Engineers,

Glenn D. Boreman, Vol. TT31

• Optical Engineering Fundamentals,

Bruce H. Walker, Vol. TT30

• Introduction to Radiometry,

William L. Wolfe, Vol. TT29

• Lithography Process Control,

Harry J. Levinson, Vol. TT28

• An Introduction to Interpretation of Graphic Images,

Sergey Ablameyko, Vol. TT27

• Thermal Infrared Characterization of Ground Targets and Backgrounds,

Jacobs, Vol. TT26

• Introduction to Imaging Spectrometers,

William L. Wolfe, Vol. TT25

• Introduction to Infrared System Design,

William L. Wolfe, Vol. TT24

• Introduction to Computer-based Imaging Systems,

Sinha, E. R. Dougherty, Vol. TT23

• Optical Communication Receiver Design,

Stephen B. Alexander, Vol. TT22

Downloaded from SPIE Digital Library on 25 Feb 2010 to 130.60.68.45. Terms of Use: http://spiedl.org/terms

Optical Imaging in

Projection Microlithography

Alfred Kwok-Kit Wong

Tutorial Texts in Optical Engineering

Volume TT66

PRESS

SPIE

Bellingham, Washington USA

Downloaded from SPIE Digital Library on 25 Feb 2010 to 130.60.68.45. Terms of Use: http://spiedl.org/terms

Library of Congress Cataloging-in-Publication Data

Wong, Alfred Kwok-Kit.

Optical imaging in projection microlithography / Alfred Kwok-Kit Wong.

p. cm.

Includes bibliographical references and index.

ISBN 0-8194-5829-5 (softcover)

1. Microlithography. 2. Imaging systems. I. Title.

TK7836.W66 2005

621.3815'31—dc22

2005042537

Published by

SPIE—The International Society for Optical Engineering

P.O. Box 10

Bellingham, Washington 98227-0010 USA

Phone: +1 360 676 3290

Fax: +1360 647 1445

Email: spie@spie.org

Web: http://spie.org

in any form or by any means without written permission of the publisher.

The content of this book reflects the work and thought of the author(s).

Every effort has been made to publish reliable and accurate information herein,

but the publisher is not responsible for the validity of the information or for any

outcomes resulting from reliance thereon.

Printed in the United States of America.

The International Society

Vil.;

for Optical Engineering

Downloaded from SPIE Digital Library on 25 Feb 2010 to 130.60.68.45. Terms of Use: http://spiedl.org/terms

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